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@InProceedings{Pub_8849, author = {T. Huynh Bao, S. Sakhare, A. Mercha, D. Verkest, A. Thean and P. Wambacq}, title={Toward the 5nm technology: layout optimization and performance benchmark for logic/SRAMs using lateral and vertical GAA FETs}, booktitle = {Design-Process-Technology Co-optimization for Manufacturability X}, publisher = {SPIE}, month={Feb}, year={2016}, pages={12} }
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