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Conference Publication
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%0 Conference Paper %A W. Vandermeiren %A J. Stiens %A C. De Tandt %A W. Ranson %A G. Shkerdin %A R. Vounckx %T Wafer scale non-destructive metrology on sub-wavelength diffraction gratings by means of Wood's anomaly %B SPIE Optical Micro- and Nanometrology IV %I SPIE %8 May. 2012 %P 6
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