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%0 Conference Paper %A A. Pourkazemi %A J. Stiens %A M. Becquaert %A M. Vandewal %T Novel illumination and parameter extraction technique for the characterization of multilayer structures in the GHz range with deep sub-wavelength resolution %B Novel illumination and parameter extraction technique for the characterization of multilayer structures in the GHz range with deep sub-wavelength resolution %8 Apr. 2015
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