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Angular spectroscopic analysis: an optical characterization technique for laterally oxidized AlGaAs layers This publication appears in: J. Appl. Phys. Authors: P. Heremans, M. Kuijk, R. Windisch, J. Vanderhaegen, H. De Neve, R. Vounckx and G. Borghs Issue: 10 Pages: 5267 Publication Year: 1997
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