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Optimised microlens shape by reflow of multiple layers of photoresist: Experimental data and lens shape calculations

Host Publication: EOS Topical Meeting on Microlens Arrays

Authors: J. Genoe, P. Heremans, M. Kuijk, R. Vounckx and G. Borghs

Publication Year: 1997
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Prof. Maarten Kuijk

+32 (0)02 629 299

mkuijk@etrovub.be

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Prof. Dr. Roger Vounckx

+32 (0)02 629 102

rvounckx@etrovub.be

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