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A 1k-Pixel 3D CMOS Sensor Host Publication: IEEE Sensors 2008 Authors: W. van der Tempel, R. Grootjans, D. Van Nieuwenhove and M. Kuijk Publication Date: Oct. 2008
Abstract: A solid-state three-dimensional Time-of-Flight sensor is
presented consisting of 32×32 range pixels based on Current-
Assisted Photonic Demodulation (CAPD). Each pixel measures
30um x 30um and consists of 6 transistors and a
differential current-assisted photonic demodulator, yielding a
Fill-Factor of 66%. The sensor is implemented in 0.35m
standard CMOS technology without optical optimization steps,
while still achieving a 0.2 A/W responisivity at 870nm. Rangefinding
is achieved through Modulated Wave Time-of-Flight
using a modulation frequency of 20MHz. The range performance
of this sensor is discussed and TOF measurements of
a prototype camera-system using this sensor are presented.
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