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Thin-film surface-textured LEDs with current injection through a rear reflector Host Publication: LIGHT-EMITTING DIODES: RESEARCH, MANUFACTURING, AND APPLICATIONS VI Authors: R. Windisch, C. Rooman, S. De Jonge, C. Kamutsch, K. Streubel, M. Kuijk, B. Dutta, G. Borghs and P. Heremans Publisher: SPIE Publication Date: Feb. 2002 Number of Pages: 6 ISBN: 0-8194-4380-8
Abstract: Very high external efficiencies have been reported from surface-textured thin-film light-emitting diodes. We have developed a novel process for the wafer-scale fabrication of surface-textured thin-film LEDs, avoiding the use of wet thermal oxidation and epitaxial lift-off. The LEDs consist of a double-mesa structure with a structured gold reflector serving simultaneously as a p-contact. The light emission occurs on the side of the original GaAs substrate, which is removed by selective etching after glueing the sample with the processed side onto a carrier substrate
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