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@Article{Pub_7568, author = {A. Elhawil, C. Neve, B. Olbrechts, I. Huynen, J. Raskin, G. Poesen, J. Stiens and R. Vounckx}, title={Contactless monitoring of Si substrate permittivity and resistivity from microwave to millimeter wave frequencies}, journal={Microwave and Optical Technology Letters}, volume={52}, issue={11}, pages={2500-2505}, month={Nov}, year={2010} }
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